Characterization of the hydrogen introduced by glow discharge in multicrystalline silicon

Ghannam, MoustafaMoustafaGhannamBeyer, W.W.BeyerEl Gamel, HussamHussamEl GamelNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/170Characterization of the hydrogen introduced by glow discharge in multicrystalline siliconProceedings paper