Wu, Ming FangMing FangWuVantomme, AndreAndreVantommeDe Wachter, JoJoDe WachterDegroote, S.S.DegrootePattyn, HugoHugoPattynLangouche, G.G.LangoucheBender, HugoHugoBender2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1666Comprehensive Rutherford backscattering and channeling study of ion-beam-synthesized ErSi1.7 layersJournal article