Chan, P. C. H.P. C. H.ChanYan, G. Z.G. Z.YanSheng, L. Y.L. Y.ShengSharma, R. K.R. K.SharmaTang, Z.Z.TangSin, J.K.O.J.K.O.SinHsing, I. M.I. M.HsingWang, Y.Y.Wang2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6093An integrated gas sensor technology using surface micro- machiningJournal article