Orientation-dependent stress build-up during the formation of epitaxial CoSi2

Steegen, AnAnSteegenDetavernier, C.C.DetavernierLauwers, A.A.LauwersMaex, KarenKarenMaexVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.Cardon2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5672Orientation-dependent stress build-up during the formation of epitaxial CoSi2Journal article