Westerveld, WouterWouterWesterveldFigeys, BrunoBrunoFigeysGao, HangHangGaoHuang, Chih-HsienChih-HsienHuangVerhaegen, FabianFabianVerhaegenTroia, BenedettoBenedettoTroiaHaouari, RachidRachidHaouariNeutens, PieterPieterNeutensO'Callaghan, JohnJohnO'CallaghanLenci, SilviaSilviaLenciRottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34434Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technologyProceedings paper