The importance of dynamic contact angles in immersion lithography and how to measure them

Fyen, WimWimFyenWells, GreggGreggWellsKocsis, MichaelMichaelKocsisKim, H-WH-WKimMaenhoudt, MireilleMireilleMaenhoudt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10472The importance of dynamic contact angles in immersion lithography and how to measure themOral presentation