Carbonell, LaureLaureCarbonellRatchev, PetarPetarRatchevCaluwaerts, RudyRudyCaluwaertsVan Hove, MarleenMarleenVan HoveVerlinden, B.B.VerlindenMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6080Dry oxidation mechanisms of copper in trenchesJournal article