Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes

Han, Jeong HwanJeong HwanHanLee, Sang WoonSang WoonLeeChoi, Byung JoonByung JoonChoiEom, TaeyongTaeyongEomKim, Seong KeunSeong KeunKimSong, Seul JiSeul JiSongLee, WoongkyuWoongkyuLeeHwang, cheol seongcheol seongHwang2021-10-212021-10-2120130010-8545https://imec-publications.be/handle/20.500.12860/22457Influences of metal, non-metal precursors, and substrates on atomic layer deposition processesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0010854513000933