Silicon nitride induced hydrogenation of silicon/silicon oxide interfaces for rear surface passivation of industrial-type thin solar cells

Dekkers, HaroldHaroldDekkersAgostinelli, GuidoGuidoAgostinelliMa, YueYueMaBeaucarne, GuyGuyBeaucarne2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12033Silicon nitride induced hydrogenation of silicon/silicon oxide interfaces for rear surface passivation of industrial-type thin solar cellsProceedings paper