Pollentier, IvanIvanPollentierTimmermans, MarinaMarinaTimmermansHuyghebaert, CedricCedricHuyghebaertBrems, StevenStevenBremsGallagher, EmilyEmilyGallagher2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35751The EUV CNT pellicle: balancing material properties to optimize performanceProceedings paperhttps://doi.org/10.1117/12.2552357