Fine pitch rapid heat self-aligned assembly and liquid-mediated direct bonding of Si cIEMCBEhips

Dubey, VikasVikasDubeyDerakhshandeh, JaberJaberDerakhshandehBeyne, EricEricBeyneCelis, Jean PierreJean PierreCelisDe Wolf, IngridIngridDe Wolf2021-10-232021-10-2320162156-3950https://imec-publications.be/handle/20.500.12860/26584Fine pitch rapid heat self-aligned assembly and liquid-mediated direct bonding of Si cIEMCBEhipsJournal articlehttp://ieeexplore.ieee.org/document/7442100/