Towards sub-10nm carrier profiling with spreading resistance techniques

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4200Towards sub-10nm carrier profiling with spreading resistance techniquesOral presentation