El Otell, ZiadZiadEl OtellMarinov, DaniilDaniilMarinovSamara, VladimirVladimirSamaraBowden, MarkMarkBowdende Marneffe, Jean-FrancoisJean-Francoisde MarneffeVerdonck, PatrickPatrickVerdonckBraithwaite, Nicholas St. J.Nicholas St. J.Braithwaite2021-10-222021-10-2220150963-0252https://imec-publications.be/handle/20.500.12860/25249Development of a novel wafer-probe for in situ measurements of thin film propertiesJournal articlehttp://iopscience.iop.org/0963-0252/24/3/032002/