Defect engineering for shallow n-type junctions in germanium: facts and fiction

Simoen, EddyEddySimoenSchaekers, MarcMarcSchaekersLiu, JinbiaoJinbiaoLiuLuo, JunJunLuoZhao, ChaoChaoZhaoBarla, KathyKathyBarlaCollaert, NadineNadineCollaert2021-10-232021-10-2320161862-6300https://imec-publications.be/handle/20.500.12860/27322Defect engineering for shallow n-type junctions in germanium: facts and fictionJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201600491/abstract