Effect of an in-situ H2 plasma pretreatment on the minority carrier lifetime of a-Si:H(i) passivated crystalline silicon

Granata, StefanoStefanoGranataBearda, TwanTwanBeardaDross, FredericFredericDrossGordon, IvanIvanGordonPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20749Effect of an in-situ H2 plasma pretreatment on the minority carrier lifetime of a-Si:H(i) passivated crystalline siliconProceedings paper