A new dummy-free shallow trench isolation concept for mixed-signal applications

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersAugendre, EmmanuelEmmanuelAugendreVandamme, EwoutEwoutVandammePerello, CarlesCarlesPerelloHeylen, NancyNancyHeylenGrillaert, JoostJoostGrillaertDeferm, LudoLudoDeferm2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3198A new dummy-free shallow trench isolation concept for mixed-signal applicationsProceedings paper