Jacob, A. P.A. P.JacobMyrberg, T.T.MyrbergYousif, M. Y. A.M. Y. A.YousifNur, O.O.NurWillander, M.M.WillanderLundgren, P.P.LundgrenSveinbjörnson, E. Ö.E. Ö.SveinbjörnsonCaymax, MattyMattyCaymax2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6425Low temperature electrical performance of ultrathin oxide MOS capacitors with p+ poly-Si1-xGex and poly-Si gate materialsProceedings paper