Wang, HuiHuiWangBruynseraede, ChristopheChristopheBruynseraedeMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9902The influence of surface fluctuations on early failures in single-damascene Cu wires: a weakest link approximation analysisProceedings paper