Nanopotentiometry: Local potential measurements in complementary metal-oxide-semiconductor transistors using atomic force microscopy

Trenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3000Nanopotentiometry: Local potential measurements in complementary metal-oxide-semiconductor transistors using atomic force microscopyJournal article