Arimura, HiroakiHiroakiArimuraCapogreco, ElenaElenaCapogrecoVohra, AnuragAnuragVohraPorret, ClémentClémentPorretLoo, RogerRogerLooRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyCott, DaireDaireCottBoccardi, GuillaumeGuillaumeBoccardiWitters, LiesbethLiesbethWittersEneman, GeertGeertEnemanMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertHoriguchi, NaotoNaotoHoriguchi2021-12-092021-12-062021-12-092021-12-0920202380-9248WOS:000717011600117https://imec-publications.be/handle/20.500.12860/38542Toward high-performance and reliable Ge channel devices for 2 nm node and beyondProceedings paper10.1109/IEDM13553.2020.9372007978-1-7281-8888-1WOS:000717011600117