PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch

Roda Neve, CésarCésarRoda NeveSchuddinck, PieterPieterSchuddinckBufler, FabianFabianBuflerXiang, YangYangXiangFarokhnejad, AnitaAnitaFarokhnejadMirabelli, GioeleGioeleMirabelliVandooren, AnneAnneVandoorenChehab, BilalBilalChehabGupta, AnshulAnshulGuptaHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaert2022-04-212022-04-122022-04-212022-061063-9667https://imec-publications.be/handle/20.500.12860/39613PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitchProceedings paperElectrical & electronic engineeringPPAC, CFET, forksheet, scaling, SAGM, HOT