Goethals, MiekeMiekeGoethalsVan Roey, FriedaFriedaVan RoeySugihara, TakashiTakashiSugiharaVan den hove, LucLucVan den hoveVertommen, JohanJohanVertommenKlippert, W.W.Klippert2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2589Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processesJournal article