Electron diffraction contrast imaging as a tool for nano-range strain analysis and application to a semiconductor laser structure

Janssens, KoenraadKoenraadJanssensVanhellemont, JanJanVanhellemontMaes, HermanHermanMaesVan Der Biest, O.O.Van Der BiestHull, R.R.Hull2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/694Electron diffraction contrast imaging as a tool for nano-range strain analysis and application to a semiconductor laser structureProceedings paper