Dessein, KristofKristofDesseinNemeth, StefanStefanNemethVlutters, R.R.VluttersDelaey, L.L.DelaeyDe Boeck, JoJoDe BoeckBorghs, GustaafGustaafBorghs2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3413Evaluation of room temperature wafer bonding by fabrication of a GaAs/Pt/Si metal base transistorProceedings paper