Li, HuaHuaLiVereecke, GuyGuyVereeckeMaex, KarenKarenMaexFroyen, L.L.Froyen2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5443Gaseous impurities in Co silicidation - impact and solutionsJournal article