Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

Schulze, AndreasAndreasSchulzeLoo, RogerRogerLooWitters, LiesbethLiesbethWittersMertens, HansHansMertensGawlik, AndrzejAndrzejGawlikHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertWormington, MatthewMatthewWormingtonRyan, PaulPaulRyanVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-242021-10-2420171610-1634https://imec-publications.be/handle/20.500.12860/29402Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffractionJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201700156/full