Zhang, WenqiWenqiZhangBrongersma, SywertSywertBrongersmaConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9975Impurity determination in narrow copper linesOral presentation