Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersPhilipsen, HaroldHaroldPhilipsenHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33386Wet etching of Ruthenium: effect of thermal annealingMeeting abstract