High-Q free-standing silicon nitride microdisk vertically coupled with on-chip waveguide

Xie, WeiqiangWeiqiangXieVan Thourhout, DriesDriesVan Thourhout2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24845High-Q free-standing silicon nitride microdisk vertically coupled with on-chip waveguideProceedings paperhttp://www.opticsinfobase.org/abstract.cfm?uri=CLEO_SI-2014-STu3M.3