A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications

Li, HuaHuaLiJin, S.S.JinProost, JorisJorisProostVan Hove, MarleenMarleenVan HoveFroyen, L.L.FroyenMaex, KarenKarenMaex2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2722A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applicationsProceedings paper