Brems, StevenStevenBremsHauptmann, MarcMarcHauptmannCamerotto, ElisabethElisabethCamerottoStruyf, HerbertHerbertStruyfMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20390Optimizing high frequency ultrasound cleaning in the semiconductor industryProceedings paper