Houssa, M.M.HoussaAutran, J.L.J.L.AutranAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6409Defect generation in ultrathin SiON/ZrO2 gate dielectric stacksJournal article