Double-sided processing for membrane-based photonic integration

Shen, LongfeiLongfeiShenJiao, YuqingYuqingJiaoHiguera-Rodriguez, AuraAuraHiguera-RodriguezMillan-Mejia, AlonsoAlonsoMillan-MejiaRoelkens, GuntherGuntherRoelkensSmit, M.M.Smitvan de Tol, JosJosvan de Tol2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27301Double-sided processing for membrane-based photonic integrationMeeting abstract