Making lots of little holes (or using CMOS mass fabrication technology to make photonic crystals)

Bogaerts, WimWimBogaertsWiaux, VincentVincentWiauxTaillaert, DirkDirkTaillaertBeckx, StephanStephanBeckxBaets, RoelRoelBaets2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6044Making lots of little holes (or using CMOS mass fabrication technology to make photonic crystals)Oral presentation