Optimized material solutions for advanced DRAM peripheral transistors

Spessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramHoriguchi, NaotoNaotoHoriguchiFazan, PierrePierreFazan2021-10-232021-10-2320161862-6300https://imec-publications.be/handle/20.500.12860/27339Optimized material solutions for advanced DRAM peripheral transistorsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201532791/abstract