What's in space – Exploration and improvement of line/space defect inspection of fine-pitch redistribution layer for fan-out wafer level packaging

Liebens, MaartenMaartenLiebensSlabbekoorn, JohnJohnSlabbekoornMiller, AndyAndyMillerBeyne, EricEricBeyneYeoh, RichardRichardYeohKrah, T.T.KrahVangal, A.A.VangalHiebert, S.S.HiebertCross, A.A.Cross2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33449What's in space – Exploration and improvement of line/space defect inspection of fine-pitch redistribution layer for fan-out wafer level packagingMeeting abstracthttps://ieeexplore.ieee.org/document/8791791