Romo Negreira, AinhoaAinhoaRomo NegreiraYounkin, ToddToddYounkinGronheid, RoelRoelGronheidDemuynck, StevenStevenDemuynckVandenbroeck, NadiaNadiaVandenbroeckSeo, TakehitoTakehitoSeoGuerrero, DouglasDouglasGuerreroParnell, DoniDoniParnellMuramatsu, MakotoMakotoMuramatsuShinichiro, KawakamiKawakamiShinichiroTakashi, YamauchiYamauchiTakashiNafus, KathleenKathleenNafusSomervell, MarkMarkSomervell2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24451Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity controlProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857172