Choulat, PatrickPatrickChoulatDuerinckx, FilipFilipDuerinckxVan Kerschaver, EmmanuelEmmanuelVan KerschaverDross, FredericFredericDrossBeaucarne, GuyGuyBeaucarne2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10221Minimizing the dead layer of industrial phosphorous emitters formed by POCl3 diffusionProceedings paper