Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation

Bogdanowicz, JanuszJanuszBogdanowiczKumar, ArulArulKumarFleischmann, ClaudiaClaudiaFleischmannGilbert, MatthieuMatthieuGilbertHouard, JonathanJonathanHouardVella, AngelaAngelaVellaVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520180304-3991https://imec-publications.be/handle/20.500.12860/30281Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparationJournal articlehttps://www.sciencedirect.com/science/article/pii/S0304399117304217