High velocity aerosol cleaning with organic solvents: particle removal and substrate damage

Andreas, MichaelMichaelAndreasWostyn, KurtKurtWostynWada, MasayukiMasayukiWadaJanssens, TomTomJanssensKenis, KarineKarineKenisBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13301High velocity aerosol cleaning with organic solvents: particle removal and substrate damageOral presentation