Optimized design and placement of piezoelectric transducers for micromechanical structures subject to membrane stress

Brondani Torri, GuilhermeGuilhermeBrondani TorriRottenberg, XavierXavierRottenbergKarabacak, DevrezDevrezKarabacakVandecasteele, MarianneMarianneVandecasteeleVan Hoof, ChrisChrisVan HoofPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-202021-10-202012-04https://imec-publications.be/handle/20.500.12860/20393Optimized design and placement of piezoelectric transducers for micromechanical structures subject to membrane stressProceedings paperhttp://dx.doi.org/10.1109/ESimE.2012.6191753