Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologies

Lauwers, A.A.Lauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsaySteegen, AnAnSteegenRoelandts, NicoNicoRoelandtsLossen, F.F.LossenVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5438Electrical performance and scalability of Ni-monosilicide towards sub 0.13 μm technologiesOral presentation