Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

Wouters, LennaertLennaertWoutersMinj, AlbertAlbertMinjCelano, UmbertoUmbertoCelanoHantschel, ThomasThomasHantschelParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36338Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance MicroscopyJournal articlehttps://parksystems.com/images/media/appnote/SSRM-SCM-in-HV_AppNote54_Park-Systems.pdf