Review of a 200mm SOI silicon photonics platform performance for low-power optical integrated circuits development

Absil, PhilippePhilippeAbsilVerheyen, PeterPeterVerheyenPantouvaki, MariannaMariannaPantouvakiDe Heyn, PeterPeterDe HeynChen, HongtaoHongtaoChenLepage, GuyGuyLepageDe Coster, JeroenJeroenDe CosterRakowski, MichalMichalRakowskiDumon, PieterPieterDumonKhanna, AmitAmitKhannaRoelkens, GuntherGuntherRoelkensBaets, RoelRoelBaetsVan Campenhout, JorisJorisVan Campenhout2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23464Review of a 200mm SOI silicon photonics platform performance for low-power optical integrated circuits developmentProceedings paper