Nanoindentation based method to determine the thermal expansion coefficients of low-k dielectrics

Vanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalezSalahouelhadj, AbdellahAbdellahSalahouelhadj2022-11-282022-09-222022-11-282022-10-010040-6090https://imec-publications.be/handle/20.500.12860/40484Nanoindentation based method to determine the thermal expansion coefficients of low-k dielectricsJournal articlehttps://doi.org/10.1016/j.tsf.2022.139467