Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM

Armini, SilviaSilviaArminiBurtovyy, RuslanRuslanBurtovyyMoinpour, MansourMansourMoinpourLuzinov, IgorIgorLuzinovDe Messemaeker, JokeJokeDe MessemaekerWhelan, CarolineCarolineWhelanMaex, KarenKarenMaex2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/13311Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFMJournal articlehttp://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JESOAN&smode=strresults&CURRENT=&ONLINE=YES&SMODE=&ver=&sti=&arttype=