Eurlings, M.M.EurlingsHsu, S.D.S.D.HsuHendrickx, EricEricHendrickxop 't Root, W.W.op 't RootLaidig, T.L.T.L.LaidigChiou, T.B.T.B.ChiouChen, A.A.ChenChen, F.F.ChenVandenberghe, GeertGeertVandenbergheFinders, J.J.Finders2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8893Experimental verification of a model based decomposition method for double dipole lithographyProceedings paper