Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Jin, S.S.JinBender, HugoHugoBenderLi, X. N.X. N.LiZhang, ZhengZhengZhangDong, C.C.DongGong, Z. X.Z. X.GongMa, T. C.T. C.Ma2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1956Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substratesJournal article