Yakimets, DmitryDmitryYakimetsJang, DoyoungDoyoungJangRaghavan, PraveenPraveenRaghavanEneman, GeertGeertEnemanMertens, HansHansMertensSchuddinck, PieterPieterSchuddinckMallik, ArindamArindamMallikGarcia Bardon, MarieMarieGarcia BardonCollaert, NadineNadineCollaertMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkestThean, AaronAaronTheanDe Meyer, KristinKristinDe Meyer2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26212Lateral NWFET optimization for beyond 7nm nodesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165887