Atkinson, A.A.AtkinsonJain, SureshSureshJainMaes, HermanHermanMaesPinardi, KuntjoroKuntjoroPinardiWillander, M.M.Willander2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5017Depth profiling of strain using micro-Raman measurementsJournal article